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Thanks to everyone for the suggestions!

Unfortunately the combination of \subequations, \align and \uncover does not work well together with the rest I have on the slide. I am copying the code below, so you can see yourself what's wrong (which is easier than me explaining in words):



\begin ...

Thanks Stefan for the swift reply. It looks good indeed, but there are 2 problems.

I want to blend in the 2 equations sequentially. It normally works with \pause, but in the align environment \pause does not seem to work.

Equations (3a) and (3b) are part of a series of equations in the document ...

I am writing a beamer document in which I would like to subnumber the formulas within an array.

It is supposed to look like the following

a = (b*c)*d^(-2) (3')
= (b*c)/d^2 (3'')

Instead of (3') and (3'') it could also read (3a) and (3b)

Any helpful ideas would be appreciated!